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Costs

Access for third-party projects

via DFG

We recommend FZJ as applicant or associated partner. Only then a use by DFG cost rates is possible. DFG funds up to € 60 thousand for cleanroom use. For research partners who have a cooperation agreement with us, the use is free with a DFG project. The cost of material consumption had to be completely charged (19% VAT)

via BMBF or EU

We recommend FZJ as applicant or associated partner. Only then a use by the BMBF or EU costs rates is possible.

via cooperation agreement

The access is regulated via cooperation agreements between the Research Centre Jülich and the using institution (university, college, research institute, etc.) in combination with an R & D contract (institution, department, etc.) of the institution. Package arrangements are possible.


as an industrial partner

If there is not a cooperation agreement and/or R & D contract between the Research Centre Jülich and the user the access is billed for full cost.

Cost rates for industrial partners in €/h + 19% VAT

EBPG 5000

155

PLS 500

69

PLS 570

130

PECVD1

64

PECVD2

69

EVO2

98

RIE3

87

RIE 4

67

RIE5

74

RIE6

70

RIE7

70

TePLa 360

28

MA1

51

MA2

50

MA3

52

MA4

75

Saw

57

Tempress

78

CLV1/2

50

RTP

91

SSEC

47

RBS

200

Imprint

42

Implanter

400

WB-Si

25

WB-3/5

20

WB-Bio

20

Preclean

23

WB-Mask

32

SEM Zeiss

85

SEM FEI

126

FIB FEI

167

S800

45




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