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Costs

Access for third-party projects

via DFG

We recommend FZJ as applicant or associated partner. Only then a use by DFG cost rates is possible. DFG funds up to € 60 thousand for cleanroom use. For research partners who have a cooperation agreement with us, the use is free with a DFG project. The cost of material consumption had to be completely charged (19% VAT)

via BMBF or EU

We recommend FZJ as applicant or associated partner. Only then a use by the BMBF or EU costs rates is possible.

via cooperation agreement

The access is regulated via cooperation agreements between the Research Centre Jülich and the using institution (university, college, research institute, etc.) in combination with an R & D contract (institution, department, etc.) of the institution. Package arrangements are possible.


as an industrial partner

If there is not a cooperation agreement and/or R & D contract between the Research Centre Jülich and the user the access is billed for full cost.

Cost rates for industrial partners in €/h + 19% VAT

EBPG 5000

326

PLS 500

173

PLS 570

163

PECVD1

25

PECVD2

48

EVO2

41

RIE3

51

RIE 4

50

RIE5

55

RIE6

58

RIE7

53

TePLa 360

11

MA1

35

MA2

33

MA3

34

MA4

56

Saw

37

Tempress

52

CLV1/2

30

RTP

54

SSEC

37

RBS

200

Imprint

31

Implanter

346

Univex 400

Se 800

21

ALD

104

Sigma 300

51

Dektak

16

STM

17

WB-Si

25

WB-3/5

20

WB-Bio

30

Preclean

23

WB-Mask

32

SEM Zeiss

49

SEM FEI

237

FIB FEI

296



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