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Installation of nanocluster completed

The installation of the nanocluster, a ultra-high vacuum tool combining 8 deposition chambers, is completed. The nanocluster is operated by the Peter Grünberg Institute und the RWTH Aachen and is located in the Helmholtz Nanoelectronic Facility (HNF).

The nanocluster, developed and build by Scienta Omicron GmbH, consists of:


• a group III-As MBE
• a group III-As/Sb MBE
• an ALD
• a metal-MBE
• a phase change MBE
• an oxide sputter chamber
• a metal sputter chamber
• as well as a metal oxide MBE


The nanocluster is designed for substrates up to 4’’ and enables the growth of in-situ passivated high quality nanostructures as well as complex heterostructures. In combination with the HNF this allows fabricating and investigating new devices within the JARA-FIT and “GreenIT” framework.

Nanocluster InstallationDetail nanocluster with transfer chamber
Copyright: Torsten Rieger, Benjamin Bennemann, PGI-9


Detail of nanoclusterDetail of nanocluster
Copyright: Torsten Rieger, Benjamin Bennemann, PGI-9

Nanocluster InstallationOverview nanocluster
Copyright: Torsten Rieger, Benjamin Bennemann, PGI-9

Nanocluster InstallationModule 1 molecular beam epitaxy
Copyright: Torsten Rieger, PGI-9

Contact:

Torsten Rieger, t.rieger@fz-juelich.de


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