link to homepage

Peter Grünberg Institute

Navigation and service

Nanocrystalline HfO2 covering InAs nanowires

If HfO2 is deposited by atomic layer deposition (ALD) on InAs nanowires, crystalline HfO2 regions develop already for thin layers. This has been shown by researchers from the Peter Grünberg Institut and the University Siegen.

InAs nanowires are potential candidates for future field effect transistors (FETs), however, for this purpose, the surface of the nanowires has to be passivated and a high-k dielectric has to be deposited. This can be e.g. HfO2. The investigations show that the HfO2 deposited by ALD covers the nanowires homogenously. However, already for film thicknesses as small as 3 nm as well as at low deposition temperatures, nanocrystalline regions are found in the HfO2. These nanocrystalline regions would influence the performance of the FETs. The investigations focus on the formation, development and crystal structure of the crystallites as well as their suppression. By using a laminate structure of HfO2 and Al2O3, the formation of the crystalline HfO2 can be suppressed even at high temperatures. (Publication)

HfO2 layer on the surface of an InAs nanowireHfO2 layer on the surface of an InAs nanowire
Copyright: Torsten Rieger, PGI-9


Torsten Rieger,









Dear visitor,

To make our website suit your needs even more and to give it a more appealing design, we would like you to answer a few short questions.

Answering these questions will take approx. 10 min.

Start now Close window

Thank you for your support!


In case you have already taken part in our survey or in case you have no time to take part now, you can simply close the window by clicking "close".

If you have any questions on the survey, please do not hesitate to contact:


Your Team at Forschungszentrum Jülich


Note: Forschungszentrum Jülich works with the market research institute SKOPOS to anonymously conduct and analyze the survey. SKOPOS complies with the statutory requirements on data protection as well as with the regulations of ADM (Arbeitskreis Deutscher Markt- und Sozialforschungsinstitute e.V.) and ESOMAR (Europäische Gesellschaft für Meinungs- und Marketingforschung). Your data will not be forwarded to third parties.