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Pulsed Laser Deposition

Pulsed Laser Deposition (PLD) is an extremely versatile process to deposit thin films of complex composition. Our two excimer lasers together with four process chambers are used to grow amorphous, polycrystalline or epitaxial single crystalline films of oxides - especially thin film ferroelectrics or insulating oxides for field effect transistors or thin superconducting films, as YBa2Cu3O7. The powerful ultraviolet lasers are focussed onto the stoichometric targets and rapidly remove material from the target surface. It forms a plasma, which condenses onto heated substrates and permits epitaxial growth of thin film on these substrates. Growth rates exceed nanometers per second and a film thickness of 1 µm is routinely accomplished. The PLD process can be conducted under the admission of gases, as oxygen, nitrogen or others.

PLD-360-360

Different oxidesScandates as alternative gate dielectrics
Sr1-xBaxTiO3GdScO3
EuTiO3DyScO3
CaTiO3SmScO3
LaAlO3LaScO3
Ta2O5TbScO3
PrGaO3YbScO3
NdGaO3TmScO3
LiNbO3LuScO3
KNbO3LaLuO3
Al2O3Binary oxides
ZrO2Er2O3
YSZGd2O3
SrZrO3CeO2
BaZrO3Y2O3
TbMnO3conducting oxides
DyMnO3La0.66Ba0.33MnO3
MnO2La0.33Ca0.66MnO3
LaCoO3La0.65Ca0.35MnO3
Sr0.5Hf0.7O2La0.66Sr0.33MnO3
SrTa2O5SrRuO3
chalcogenide glassesYBa2Cu3O7-x
Ca0.28Ba0.72NbO3PrBa2Cu3O7-x

Epitaktial heterostructures (papers)

Luysberg, M.; Heidelmann, M.; Houben, L.; Boese, M.; Heeg, T.; Roeckerath, M.; Schubert, J.
Intermixing and charge neutrality at DyScO3/SrTiO3 interfaces
Acta Materialia 57 (2009) 3192-3198

Jia, C.L., Mi, S.B., Faley, M.; Poppe, U.; Schubert, J. ; Urban, K.
Oxygen octahedron reconstruction in the SrTiO3/LaAlO3 heterointerfaces investigated using aberration-corrected ultrahigh-resolution transmission electron microscopy
Physical Review B 79,(2009) 081405(R)

Cooperation with other groups in different research fields

Lee, J. H.; Fang, L.; Vlahos, E.; Ke, X.; Jung, Y. W.; Fitting Kourkoutis, L.; Kim, J.W.; Ryan, P.; Heeg, T.; Roeckerath, M.; Goian, V.; Bernhagen, M.; Uecker, R.; Hammel, C.; Rabe, K. M.; Kamba, S.; Schubert, J.; Freeland, J. W.; Muller, D. A.; Fennie, C. J.; Schiffer, P.; Gopalan, V.; Johnston-Halperin, E. and Schlom, D. G.
A strong ferroelectric ferromagnet created by means of spin-phonon coupling
Nature, 499 (2010), 954 - 958

Schmehl, A.; Herrnberger, A.; Thiel, S.; Vaithyanathan,V.; Liberati, M.; Roeckerath, M.; Heeg, T.; Schubert, J.; Idzerda,Y.; Mannhart, J.; Schlom, D.G.
EuO - A Highly Versatile Half-Metallic Semiconductor Integrated with Silicon
Nature Materials, vol. 6, 11 (2007), 882-887

Ihlefeld, J.F.; Podraza, N.J.; Liu, Z.K.; Rai, R.C.; Xu, X.; Heeg, T.; Chen, Y.B.; Li, J.; Collins, R.W.; Musfeldt, J.L.; Pan, X.Q.; Schubert, J.; Ramesh, R. and Schlom, D.G.
Optical band gap of BiFeO3 grown by adsorption-controlled molecular-beam epitaxy
Appl. Phys. Lett. 92, (2008) 142908 (3 pages)

Kumar, A.; Rai, R.C.; Podraza, N.J.; Denev, S.; Ramirez, M.; Chu,Y.H.; Ihlefeld, J.F.; Heeg, T.; Schubert, J.; Schlom, D.G.; Orenstein, J.; Ramesh, R.; Collins, R.W.; Musfeldt, J.L.; Gopalan, V.
Linear and Nonlinear Optical Constants of BiFeO3
Appl. Phys. Lett. 92, (2008) 121915 (3 pages)

Choi, K.J.; Biegalski, M.; Li, Y.L.; Sharan, A.; Schubert, J.; Uecker, R.; Reiche, P.; Chen, Y.B.; Pan, X.Q.; Gopalan, V.; Chen, L.-Q.; Schlom, D.G.; Eom, C.B.
Enhancement of ferroelectricity in strained BaTiO3 thin films
Science 306 (2004) 5, 1005

Zurbuchen, M.A.; Freitas, R.S.; Wilson, M.J.; Schiffer, P.; Roeckerath, M.; Schubert, J.; Biegalski, M.D.; Mehta, G.H.; Comstock, D.J.; Lee, J.H., Jia, Y.; Schlom, D.G.
Synthesis and characterization of an n=6 Aurivillius phase incorporating magnetically active manganese, Bi7(Mn,Ti)6O21
Appl. Phys. Lett. 91, (2007) 033113 (3 pages)

Zeng, X.H.; Pogrebnyakov, A.V.; Zhu, M.H.; Jones, J.E.; Xi, X.X.; Xu, S.Y.; Redwing, J.M.; Lettieri, J.; Vaithyanathan, V.; Schlom, D.G.; Liu, Z.-K.; Trithaveesak, O.; Schubert, J.
Superconducting MgB2 thin films on silicon carbide substrates by hybrid physical-chemical vapor deposition
Appl. Phys. Lett. 82, (2003), 13, S. 2097 - 2099

Schöning, M.J.; Tsarouchas, D.; Beckers, L.; Zander, W.; Schubert, J.; Kordos, P.; Lüth, H.
A highly long-term stable silicon-based pH sensor fabricated by pulsed laser deposition technique
Sensors and Actuators B 35, 228-233 (1996)

Cooperations partners

Prof. D.G. Schlom, Cornell University, Ithaca, NY, USA
Prof. J. Mannhart, MPI Stuttgart
Dr. T. Schroeder, IHP Frankfurt/Oder
Dr. P. Kuzel, University of Prague, Czech
Prof. O. Engström, Göteborg, Sweden
Dr. S. VanElshocht, IMEC, Belgium
Prof. St. Hall, Liverpool, Great Britain
Prof. H. Kurz, AMO, Aachen
Dr. V.V. Afanasiev, Leuven University, Belgium
Prof. M. Fardmanesh, Sharif University, Teheran, Iran
Prof. L. Niinistö, Helsinki University, Finnland
Prof. M. Schöning, TU Aachen
Prof. L. Jushkin, RWTH Aachen
Prof. A. Vescan, RWTH Aachen
Prof. D. Tenne, Boise State University, Idaho, USA


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