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XRD Laboratory

The XRD lab contains three x-ray diffractometers

Philips

High resolution X-ray diffractometer (Philips, year of manufacture 1990) equipped with Bonse-Hart-monochromator und "triple axis" geometry

semiconductor heterostructures are investigated and evaluated with respect to

  • layer thickness, composition and degree of relaxation
  • measurements of asymmetric reflections are possible in grazing incidence und grazing exit geometry, however not in skew angle geometry, since the diffactometer is not equipped with an Eulerian cradle.
  • Reciprocal space maps can be recorded
  • Wafer mapping for substrates up to 2x2 inch possible
  • Simulation software for various layer structures

XRD Philips

Seiffert

Diffractometer (PTS, Seiffert, year of manufacture 1988) equipped with a powder, texture and stress goniometer according to Krause und Demirci; it can be used either with a Göbel mirror or optionally with asymmetric Ge- or a Johannsen monochromator; a position sensitive detector is also available

measurements possible:

  • pol figures
  • phase analysis
  • analysis of orientation
  • measurement of reflections in asymmetric and skew symmetric geometry


Powder specimens can also be characterized.

XRD Seifert

Bruker

High resolution diffractometer (D8, Bruker, year of manufacture 2007) equipped with the following possible

primary optics: slit optics, symmetric and asymmetric fourfold channel cut monochromators, Göbel mirror;
secondary optics: Göbel mirror, channel cut monochromator; Soller, slit optics detectors: scintillation detector, position sensitive detector equipped with a tilt stage on which samples up to 6 inch can be mounted, goniometer with Eulerian cradle, and an X-ray source which can be rotated by 90°, mapping in x and y direction ± 40 mm
With these configurations the determination of layer thickness, composition and degree of relaxation, phase analysis and orientation of layers are possible (respective software available). The following measurements can be carried out:

  • measurement of reflections in symmetric, asymmetric and skew symmetric geometry
  • reciprocal space maps
  • pol figures
  • in plane measurements
  • reflectometry

XRD Brucker


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