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Peter Grünberg Institute
(leer)

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Facilities

A number of our facilities are not only operated to satisfy our own research needs, but they also provide a wide range of services and collaborations for national and international partners at universities and industrial companies.

Deposition / Epitaxy

MOVPE

Sub 32 nm silicon platform

Pulsed Laser Deposition

Metal Organic Vapor Phase Epitaxy

III-V Molecular Beam Epitaxy and Surface Analysis

MBE (Topological Insulators)

Oxy Molecular Beam Epitaxy

Atomic Layer Deposition

SiGe-CVD epitaxy

high-k ALD

metal gate AVD

Wafer Cleaning Tool

Rapid Thermal Processing

Ion Technology

Implanter-Klein

Tandetron/RBS

Ion implantation

Characterization

He4-160-100

Magnetotransport

X-Ray Diffraction


Servicemeu

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