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Thin Film Manufacturing

Vapor deposition (PVD), LPCVD, PECVD, Sputter deposition

EVO2

Oerlikon Sputter Deposition System

Sputter deposition of various materials.

Mehr: Oerlikon Sputter Deposition System …

PLS 500

Pfeiffer PLS 500 and PLS 570

Vapor Deposition of various materials, which are molten and evaporated by an electron beam.

Mehr: Pfeiffer PLS 500 and PLS 570 …

Centrotherm LPCVD System E1200 R&D Furnace

Centrotherm LPCVD System E1200 R&D Furnace

Low pressure chemical vapor deposition.
Four tubes.
For Silicon only.

Oxford maschinen

Oxford and Sentech PECVD systems

Plasma Enhanced Chemical Vapor Deposition

Mehr: Oxford and Sentech PECVD systems …


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