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Peter Grünberg Institut (PGI)
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Process Technology

EquipmentEquipment

HNF provides state-of-the-art process technology for

We support internal and external users of the cleanroom and offer services for external clients.

Thin film manufacturing

Thin film manufacturing

Vapor deposition (PVD), LPCVD, PECVD, Sputter deposition

More: Thin film manufacturing …

Structuring

Patterning

Optical (UV), mechanical (NIL) and e-beam lithography

More: Patterning …

Characterization

Characterization

Optical, SEM, AFM microscopes, 4-point prober

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Chip fabrication

Chip fabrication

Wafer saws, bonder

More: Chip fabrication …


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