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ToF-SIMS

ToF-SIMS Einweihung (24. Juli 2003)

since Juli 2003 lateral resolution and depth resolution has greatly improved. In addition, high mass reoslution M/DM > 8000 and a mass range up to several 1000 u gives rise to organic spectroscopy for us.

We now have a

ToF-SIMS IV

from ION-TOF (Münster)


  • lateral resolution: 300nm ---> <100nm
  • bombarding energy

    (parameter affacting the depth resolution): 2 keV ---> 0.5 keV

  • parallel detection of all masses

For further questions, please contact:

Herr Dr. U. Breuer Tel.: 02461-61 5364


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