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Semiconductor Nanoelectronics (PGI-9)
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PGI-9
Expertise
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Sub 32 nm silicon research platform
Prof. Detlev Grützmacher
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Sub 32 nm silicon research platform
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Pulsed Laser Deposition
Metal-Organic Vapor Phase Epitaxy
NanoCluster Tool
Molecular Beam Epitaxy Topological Insulators
Oxy MBE
Atomic Layer Deposition
Tandetron
Ion implantation
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X-Ray Diffraction
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JARA-FIT Lab Course
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Prof. Detlev Grützmacher
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Peter Grünberg Institute (PGI-9), Forschungszentrum Jülich
52425 Jülich
Germany
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Phone:
+49 2461 61-2340
Fax:
+49 2461 61-2333
email:
d.gruetzmacher@fz-juelich.de
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Ernst Ruska-Centre for Microscopy and Spectroscopy with Electrons (ER‑C)
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Jülich Centre for Neutron Science (JCNS)
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