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Helmholtz Nano Facility (HNF)
WIKI
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Registration Access
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Tools & Booking
List of devices
Allowed resists
Allowed developer
Allowed solvents / adhesion promoter
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Technology
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Low T Etching of Silicon
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WIKI
WIKI
Link to the Wiki:
https://wiki.hnf.fz-juelich.de
Last Modified: 12.02.2025
