Thin film deposition systems

PGI-6 operates a variety of vacuum systems dedicated to the preparation of thin films employing different deposition techniques:

  • MBE-system mainly for metal deposition with ten crucibles and in-situ surface analysis tools (AES, XPS, LEED, RHEED)
  • MBE-system optimized for the growth of magnetic oxides, equipped with AES, LEED, and RHEED
  • Ion-beam sputtering system for 4”-substrates with six exchangeable targets
  • MBE-system for oxide spintronics with five crucibles, equipped with an oxygen doser, LEED, RHEED, and XPS.
Letzte Änderung: 23.03.2022