Thin film deposition systems

PGI-6 operates a variety of vacuum systems dedicated to the preparation of thin films employing different deposition techniques:

• MBE-system mainly for metal deposition with ten crucibles and in-situ surface analysis tools (AES, XPS, LEED, RHEED)
• MBE-system with 12 crucibles and 7 effusion cells. 
• Ion-beam sputtering system for 4”-substrates with six exchangeable targets
• UHV magnetron sputtering system with 4 DC and 4 HF sources.