Nanocluster
The institute hosts a state-of-the-art multi-material cluster (NanoCluster) tool. The tool provides a unique combination of nine UHV epitaxial/deposition systems including MBE, ALD, and sputtering. It offers the possibility for in-situ growth of complex nanostructures from III-V and II-VI (ZnSe based) semiconductors, metals, oxides, magnetic and phase change materials.