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Fig. 1: Schematic representation of JOSEPH. On the left hand side, the analysis cluster is shown, with tools for different methods for the characterization of the optical, structural and electronic properties as well as the chemical composition. The right hand side shows the cluster deposition system, in which different processes for the fabrication of thin layers will be available. The two clusters for analysis and deposition are connected via a loading and transfer chamber.

Last Modified: 17.03.2026